INDICATOR
"È×Ï - 1" IMPLEMENTS ONLINE
SUBSTRATE CLEANNESS MONITORING
Substrate under control: silicon, glass, quartz.
Working liquid: distilled water.
Power consumption - 10 W.
Sensitivity - 10-10 g/ñì.
Overall size - 300õ310õ120 ìì.Publications:
1. Inventor` s certificate 1741032 of 10 September 1990.
2. Inventor` s certificate 1784868 of 05 February 1990ã.
3. ÏÒÝ 1990, N 5. pp. 230-232.