Head of the DDB: PhD A. V. Volkov, associate professor.

Research team:

• DDB deals with development of microrelief fabrication technologies and technological complexes for fabrication of DÎE prototypes and DÎE-based devices.
• DDB is equipped with industrial technological facilities: optical generator “FEAG”, scanning probe microscope P4-SPM-MDT, unit for plasmo-chemical etching ÓÒÏ ÏÄÝ-125-009, unit for exposure and alignment “ÝÌ 5006À”, unit for thermo-vacuum and HF magnetion deposition, microscope for defect monitoring, among others.
• DDB's workers have developed the following equipment: a unit for monitoring the dielectric surface cleanness, an optical system for evaluating DOE parameters, a combined unit used to grow the microrelief in the layers of liquid photopolymerizable compositions (LPPC) and to fabricate high-resolution photomasks via photo-reduction; an automatic system for monitoring parameters of lighting devices, among others.

Result of research:

• Indicator "è÷ï - 1" implements online Substrate cleanness monitoring
• Laser system for experimentally evaluating The doe energy efficiency
• "Microrelief" unit
• Automatic system to control parameters Of lighting devices
• Microrelief generation techiques developed and used at IPSI RAS
• Layer-wise photoresist growth
• Fabrication of lppc-aided does
• Microrelief control
• Does with continuous and binary microrelief developed and fabricated at IPSI RAS
• Multi-level-microrelief-based does developed and fabricated at IPSI RAS
• Examples of co-planar illuminators developed and fabricated at IPSI RAS.