"MICRORELIEF" UNIT
Serves to grow the microrelief in LPPC layers and fabricate high-resolution photomasks
Can operate over a
wide wavelength range from 350 nm to 700 nm.
Reduction scale - 10.
Image field 7 - 10 mm.
Resolution 800 l/mm.
The unit is equipped with a video-camera, a PC, and software intended to control
the LPPC conversion degree.