LAYER-WISE PHOTORESIST GROWTH
A relaetively simple developed techonology allows doing without a complicated equipment while fabricating the DOE
Implementation example:
DOE parameters:
aperture diameter - 40 mm;
focal length - 400 mm;
working angle - 45 degrees;
wavelength - 10.6 mm;
segment size - 5๕0.3mm.Profilogram:
(a = 2 mm, h = 7,5 mm)
Publications:
1. Optics and Lasers Engineering, 1998, V. 29. pp. 281 - 288.
2. Computer Optics, 1996, นน 16. pp.12 - 14. .
