MAIN RESULTS:
Indicator "è÷ï - 1" implements online Substrate cleanness monitoring
Laser system for experimentally evaluating The doe energy efficiency
"Microrelief" unit
Automatic system to control parameters Of lighting devices
Microrelief generation techiques developed and used at
IPSI RAS
Layer-wise photoresist growth
Fabrication of lppc-aided does
Microrelief control
Does with continuous and binary microrelief developed and fabricated at IPSI RAS
Multi-level-microrelief-based does developed and fabricated at
IPSI RAS
Examples of co-planar illuminators developed and fabricated at
IPSI RAS
.